Issued Patents All Time
Showing 51–65 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9111727 | Plasma tuning rods in microwave resonator plasma sources | Lee Chen, Merritt Funk, Toshihiko Iwao, Peter L. G. Ventzek | 2015-08-18 |
| 9111873 | Low profile magnetic filter | Lee Chen, Merritt Funk, Zhiying Chen | 2015-08-18 |
| 9087677 | Methods of electrical signaling in an ion energy analyzer | Merritt Funk, Lee Chen, Barton Lane, Radha Sundararajan | 2015-07-21 |
| 8968588 | Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus | Lee Chen, Vincent M. Donnelly, Demetre J. Economou, Merritt Funk, Radha Sundararajan | 2015-03-03 |
| 8883024 | Using vacuum ultra-violet (VUV) data in radio frequency (RF) sources | Lee Chen | 2014-11-11 |
| 8877080 | Using vacuum ultra-violet (VUV) data in microwave sources | Lee Chen | 2014-11-04 |
| 8847159 | Ion energy analyzer | Lee Chen, Barton Lane, Merritt Funk, Radha Sundararajan | 2014-09-30 |
| 8816281 | Ion energy analyzer and methods of manufacturing the same | Merritt Funk, Lee Chen, Barton Lane, Radha Sundararajan | 2014-08-26 |
| 8808496 | Plasma tuning rods in microwave processing systems | Lee Chen, Merritt Funk, Toshihiko Iwao, Peter L. G. Ventzek | 2014-08-19 |
| 8721833 | Variable capacitance chamber component incorporating ferroelectric materials and methods of manufacturing and using thereof | Zhiying Chen, Lee Chen, Merritt Funk, Radha Sundararajan | 2014-05-13 |
| 8669705 | Stable surface wave plasma source | Lee Chen, Ronald Victor Bravenec, Merritt Funk | 2014-03-11 |
| 8660805 | Method and system for characterizing a plasma | Ronald Victor Bravenec | 2014-02-25 |
| 8486798 | Variable capacitance chamber component incorporating a semiconductor junction and methods of manufacturing and using thereof | Zhiying Chen, Lee Chen, Merritt Funk, Radha Sundararajan | 2013-07-16 |
| 8415884 | Stable surface wave plasma source | Lee Chen, Ronald Victor Bravenec, Merritt Funk | 2013-04-09 |
| 8323521 | Plasma generation controlled by gravity-induced gas-diffusion separation (GIGDS) techniques | Lee Chen, Merritt Funk, Toshihisa Nozawa | 2012-12-04 |