Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7067419 | Mask layer and dual damascene interconnect structure in a semiconductor device | Robert Huang, Subramanian Karthikeyan, Joshua Li, Isaiah O. Oladeji, Kurt G. Steiner +1 more | 2006-06-27 |
| 6893800 | Substrate topography compensation at mask design: 3D OPC topography anchored | John M. McIntosh, Scott M. Nagel | 2005-05-17 |
| 6879046 | Split barrier layer including nitrogen-containing portion and oxygen-containing portion | Gerald W. Gibson, Steven Alan Lytle, Kurt G. Steiner, Susan Clay Vitkavage | 2005-04-12 |
| 6798043 | Structure and method for isolating porous low-k dielectric films | Kurt G. Steiner, Susan Clay Vitkavage, Steve Lytle, Gerald W. Gibson | 2004-09-28 |
| 6708574 | Abnormal photoresist line/space profile detection through signal processing of metrology waveform | Erik Cho Houge, John M. McIntosh, Catherine Vartuli, Fred Stevie | 2004-03-23 |
| 6627885 | Method of focused ion beam pattern transfer using a smart dynamic template | John M. McIntosh, Erik Cho Houge, Fred Stevie, Catherine Vartuli | 2003-09-30 |
| 6258610 | Method analyzing a semiconductor surface using line width metrology with auto-correlation operation | James Walter Blatchford, Brittin Kane, Nace Layadi, John M. McIntosh, Simon John Molloy | 2001-07-10 |
| 6225639 | Method of monitoring a patterned transfer process using line width metrology | Thomas E. Adams, Thomas S. Frederick, John M. McIntosh, Catherine Vartuli | 2001-05-01 |