Issued Patents All Time
Showing 126–150 of 237 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6190732 | Method and system for dispensing process gas for fabricating a device on a substrate | Thomas R. Omstead, Panya Wongsenakhum, William Messner, Edward J. Nagy, William Starks | 2001-02-20 |
| 6188044 | High-performance energy transfer system and method for thermal processing applications | Yong Jin Lee, Jalil Kamali, Sergey Belikov | 2001-02-13 |
| 6167195 | Multizone illuminator for rapid thermal processing with improved spatial resolution | Yong Jin Lee, Xiangqun Chen | 2000-12-26 |
| 6138745 | Two-stage sealing system for thermally conductive chuck | — | 2000-10-31 |
| 6136165 | Apparatus for inductively-coupled-plasma-enhanced ionized physical-vapor deposition | — | 2000-10-24 |
| 6132805 | Shutter for thin-film processing equipment | — | 2000-10-17 |
| 6126790 | Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet | Shiyuan Cheng, Cecil J. Davis, Dorian Heimanson | 2000-10-03 |
| 6124198 | Ultra high-speed chip interconnect using free-space dielectrics | — | 2000-09-26 |
| 6122041 | Liquid cooled light pipe assembly for pyrometric temperature measurement | Habib N. Najm | 2000-09-19 |
| 6106148 | Apparatus including integral actuator with control for automated calibration of temperature sensors in rapid thermal processing equipment | Yong Jin Lee | 2000-08-22 |
| 6106682 | Thin-film processing electromagnet for low-skew magnetic orientation | Shiyuan Cheng, Xiangqun Chen, Cecil J. Davis | 2000-08-22 |
| 6108490 | Multizone illuminator for rapid thermal processing with improved spatial resolution | Yong Jin Lee, Xiangqun Chen | 2000-08-22 |
| 6090690 | Direct gas-phase doping of semiconductor wafers using an organic dopant source | — | 2000-07-18 |
| 6073576 | Substrate edge seal and clamp for low-pressure processing equipment | Cecil J. Davis | 2000-06-13 |
| 6051113 | Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexing | — | 2000-04-18 |
| 6048782 | Method for doped shallow junction formation using direct gas-phase doping | — | 2000-04-11 |
| 6048162 | Wafer handler for multi-station tool | — | 2000-04-11 |
| 6042707 | Multiple-coil electromagnet for magnetically orienting thin films | Shiyuan Cheng, Cecil J. Davis, Dorian Heimanson | 2000-03-28 |
| 6039848 | Ultra-high vacuum apparatus and method for high productivity physical vapor deposition. | Cecil J. Davis, Dorian Heimanson | 2000-03-21 |
| 6016000 | Ultra high-speed chip semiconductor integrated circuit interconnect structure and fabrication method using free-space dielectrics | — | 2000-01-18 |
| 6004029 | Method for automated calibration of temperature sensors in rapid thermal processing equipment | Yong Jin Lee | 1999-12-21 |
| 5976261 | Multi-zone gas injection apparatus and method for microelectronics manufacturing equipment | Yong Jin Lee, Ahmad Kermani | 1999-11-02 |
| 5972803 | High throughput optical curing process for semiconductor device manufacturing | Jing Shu, Ming-Jang Hwang, Cecil J. Davis | 1999-10-26 |
| 5949105 | Insulated-gate field-effect transistor structure and method | — | 1999-09-07 |
| 5936829 | Thermally conductive chuck for vacuum processor | — | 1999-08-10 |