Issued Patents All Time
Showing 176–200 of 237 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5446824 | Lamp-heated chuck for uniform wafer processing | — | 1995-08-29 |
| 5444815 | Multi-zone lamp interference correction system | Yong Jin Lee | 1995-08-22 |
| 5443315 | Multi-zone real-time emissivity correction system | Yong Jin Lee | 1995-08-22 |
| 5436494 | Temperature sensor calibration wafer structure and method of fabrication | — | 1995-07-25 |
| 5435379 | Method and apparatus for low-temperature semiconductor processing | Habib N. Najm, Ajit Paranjpe, Cecil J. Davis | 1995-07-25 |
| 5436172 | Real-time multi-zone semiconductor wafer temperature and process uniformity control system | — | 1995-07-25 |
| 5420056 | Junction contact process and structure for semiconductor technologies | — | 1995-05-30 |
| 5410162 | Apparatus for and method of rapid testing of semiconductor components at elevated temperature | Howard L. Tigelaar | 1995-04-25 |
| 5405492 | Method and apparatus for time-division plasma chopping in a multi-channel plasma processing equipment | — | 1995-04-11 |
| 5405444 | Process chamber purge module for semiconductor processing equipment | — | 1995-04-11 |
| 5403434 | Low-temperature in-situ dry cleaning process for semiconductor wafer | — | 1995-04-04 |
| 5400209 | In-situ real-time sheet resistance measurement system and method using an electrostatic chuck | — | 1995-03-21 |
| 5397962 | Source and method for generating high-density plasma with inductive power coupling | — | 1995-03-14 |
| 5397909 | High-performance insulated-gate field-effect transistor | — | 1995-03-14 |
| 5387538 | Method of fabrication of integrated circuit isolation structure | — | 1995-02-07 |
| 5377071 | Sensor apparatus and method for real-time in-situ measurements of sheet resistance and its uniformity pattern in semiconductor processing equipment | — | 1994-12-27 |
| 5373184 | SOI/semiconductor heterostructure fabrication by wafer bonding | — | 1994-12-13 |
| 5372969 | Low-RC multi-level interconnect technology for high-performance integrated circuits | — | 1994-12-13 |
| 5367606 | Multi-zone illuminator with embedded process control sensors | Robert T. Matthews, Cecil J. Davis | 1994-11-22 |
| 5354443 | Method and apparatus for physical-vapor deposition of material layers | — | 1994-10-11 |
| 5326170 | Wireless temperature calibration device and method | Habib N. Najm, Lino Velo | 1994-07-05 |
| 5322809 | Self-aligned silicide process | — | 1994-06-21 |
| 5321298 | Soi wafer fabrication by selective epitaxial growth | — | 1994-06-14 |
| 5317656 | Fiber optic network for multi-point emissivity-compensated semiconductor wafer pyrometry | Habib N. Najm | 1994-05-31 |
| 5305417 | Apparatus and method for determining wafer temperature using pyrometry | Habib N. Najm, Somnath Banerjee, Lino Velo | 1994-04-19 |