Issued Patents All Time
Showing 226–237 of 237 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5089441 | Low-temperature in-situ dry cleaning process for semiconductor wafers | — | 1992-02-18 |
| 5082542 | Distributed-array magnetron-plasma processing module and method | Cecil J. Davis | 1992-01-21 |
| 5082517 | Plasma density controller for semiconductor device processing equipment | — | 1992-01-21 |
| 5079481 | Plasma-assisted processing magneton with magnetic field adjustment | — | 1992-01-07 |
| 5073516 | Selective epitaxial growth process flow for semiconductor technologies | — | 1991-12-17 |
| 5049816 | Semiconductor substrate minority carrier lifetime measurements | — | 1991-09-17 |
| 4996077 | Distributed ECR remote plasma processing and apparatus | Steve S. Huang | 1991-02-26 |
| 4956538 | Method and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processors | — | 1990-09-11 |
| 4913929 | Thermal/microwave remote plasma multiprocessing reactor and method of use | Krishna C. Saraswat | 1990-04-03 |
| 4891499 | Method and apparatus for real-time wafer temperature uniformity control and slip-free heating in lamp heated single-wafer rapid thermal processing systems | — | 1990-01-02 |
| 4888087 | Planarized multilevel interconnection for integrated circuits | Krishna C. Saraswat | 1989-12-19 |
| 4715937 | Low-temperature direct nitridation of silicon in nitrogen plasma generated by microwave discharge | Chi Yung Fu, Krishna C. Saraswat | 1987-12-29 |