Issued Patents All Time
Showing 201–225 of 237 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5296385 | Conditioning of semiconductor wafers for uniform and repeatable rapid thermal processing | John W. Kuehne, Lino Velo | 1994-03-22 |
| 5293216 | Sensor for semiconductor device manufacturing process control | — | 1994-03-08 |
| 5286297 | Multi-electrode plasma processing apparatus | Cecil J. Davis, John I. Jones, Robert T. Matthews | 1994-02-15 |
| 5284804 | Global planarization process | — | 1994-02-08 |
| 5275976 | Process chamber purge module for semiconductor processing equipment | — | 1994-01-04 |
| 5273609 | Method and apparatus for time-division plasma chopping in a multi-channel plasma processing equipment | — | 1993-12-28 |
| 5270222 | Method and apparatus for semiconductor device fabrication diagnosis and prognosis | — | 1993-12-14 |
| 5268989 | Multi zone illuminator with embeded process control sensors and light interference elimination circuit | Robert T. Matthews, Cecil J. Davis | 1993-12-07 |
| 5265957 | Wireless temperature calibration device and method | Habib N. Najm, Lino Velo | 1993-11-30 |
| 5261965 | Semiconductor wafer cleaning using condensed-phase processing | — | 1993-11-16 |
| 5256563 | Doped well structure and method for semiconductor technologies | John W. Kuehne | 1993-10-26 |
| 5255286 | Multi-point pyrometry with real-time surface emissivity compensation | Habib N. Najm | 1993-10-19 |
| 5252501 | Self-aligned single-mask CMOS/BiCMOS twin-well formation with flat surface topography | — | 1993-10-12 |
| 5252178 | Multi-zone plasma processing method and apparatus | — | 1993-10-12 |
| 5219783 | Method of making semiconductor well structure | — | 1993-06-15 |
| 5217559 | Apparatus and method for in-situ deep ultraviolet photon-assisted semiconductor wafer processing | Ajit Paranjpe, Cecil J. Davis | 1993-06-08 |
| 5192849 | Multipurpose low-thermal-mass chuck for semiconductor processing equipment | — | 1993-03-09 |
| 5184398 | In-situ real-time sheet resistance measurement method | — | 1993-02-09 |
| 5180226 | Method and apparatus for precise temperature measurement | — | 1993-01-19 |
| 5168072 | Method of fabricating an high-performance insulated-gate field-effect transistor | — | 1992-12-01 |
| 5156994 | Local interconnect method and structure | — | 1992-10-20 |
| 5156461 | Multi-point pyrometry with real-time surface emissivity compensation | Habib N. Najm | 1992-10-20 |
| 5143862 | SOI wafer fabrication by selective epitaxial growth | — | 1992-09-01 |
| 5102821 | SOI/semiconductor heterostructure fabrication by wafer bonding of polysilicon to titanium | — | 1992-04-07 |
| 5103182 | Electromagnetic wave measurement of conductive layers of a semiconductor wafer during processing in a fabrication chamber | — | 1992-04-07 |