Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7674707 | Manufacturable reliable diffusion-barrier | Satyavolu S. Papa Rao, Stephan Grunow | 2010-03-09 |
| 7435672 | Metal-germanium physical vapor deposition for semiconductor device defect reduction | Doufeng Yue, Peijun Chen, Douglas E. Mercer | 2008-10-14 |
| 7256121 | Contact resistance reduction by new barrier stack process | Duofeng Yue, Stephan Grunow, Satyavolu Srinivas Papa Rao, Montray Leavy | 2007-08-14 |
| 7208398 | Metal-halogen physical vapor deposition for semiconductor device defect reduction | Peijun Chen, Duofeng Yue, Douglas E. Mercer | 2007-04-24 |
| 7148140 | Partial plate anneal plate process for deposition of conductive fill material | Montray Leavy, Stephan Grunow, Satyavolu Srinivas Papa Rao | 2006-12-12 |
| 7037837 | Method of fabricating robust nucleation/seed layers for subsequent deposition/fill of metallization layers | Stephan Grunow, Satyavolu S. Papa Rao | 2006-05-02 |
| 6900127 | Multilayer integrated circuit copper plateable barriers | Satyavolu S. Papa Rao, Stephan Grunow | 2005-05-31 |
| 6864108 | Measurement of wafer temperature in semiconductor processing chambers | Satyavolu S. Papa Rao, Stephan Grunow | 2005-03-08 |
| 6723636 | Methods for forming multiple damascene layers | Kenneth Newton, Changming Jin | 2004-04-20 |
| 6720255 | Semiconductor device with silicon-carbon-oxygen dielectric having improved metal barrier adhesion and method of forming the device | Richard Allen Faust, Li-Yeat Chen | 2004-04-13 |
| 6693357 | Methods and semiconductor devices with wiring layer fill structures to improve planarization uniformity | Christopher Lyle Borst, Alwin Tsao, Bobby David Strong | 2004-02-17 |
| 6291347 | Method and system for constructing semiconductor devices | Anthony Konecni | 2001-09-18 |
| 6235631 | Method for forming titanium aluminum nitride layers | — | 2001-05-22 |
| 5981382 | PVD deposition process for CVD aluminum liner processing | Anthony Konecni | 1999-11-09 |