YT

Yi Heng Tsai

TSMC: 35 patents #964 of 12,232Top 8%
Overall (All Time): #96,432 of 4,157,543Top 3%
35
Patents All Time

Issued Patents All Time

Showing 26–35 of 35 patents

Patent #TitleCo-InventorsDate
9085456 Support structure for TSV in MEMS structure Kuei-Sung Chang, Hung-Chia Tsai 2015-07-21
9065358 MEMS structure and method of forming same Chia-Hua Chu, Kuei-Sung Chang 2015-06-23
8878312 Electrical bypass structure for MEMS device Chia-Ming Hung, Hung-Sen Wang, Hsiang-Fu Chen, Te-Hsi Lee, Alex Kalnitsky +2 more 2014-11-04
8878355 Semiconductor bonding structure and process Kuei-Sung Chang, Nien-Tsung Tsai, Ting-Hau Wu 2014-11-04
8796110 Method for handling a thin substrate and for substrate capping Kuei-Sung Chang 2014-08-05
8704317 Microstructure device with an improved anchor Chung-Hsien Lin, Chun-Wen Cheng, Chia-Hua Chu 2014-04-22
8633554 MEMS device etch stop Chia-Hua Chu, Kai-Chih Liang, Chia-Pao Shu, Li-Cheng Chu, Kuei-Sung Chang +2 more 2014-01-21
8368152 MEMS device etch stop Chia-Hua Chu, Kai-Chih Liang, Chia-Pao Shu, Li-Cheng Chu, Kuei-Sung Chang +2 more 2013-02-05
8343789 Microstructure device with an improved anchor Chung-Hsien Lin, Chun-Wen Cheng, Chia-Hua Chu 2013-01-01
8232614 Package systems having a conductive element through a substrate thereof and manufacturing methods of the same Chia-Hua Chu, Kuei-Sung Chang, Chung-Hsien Lin, Chia-Ming Hung, Jung-Huei Peng +1 more 2012-07-31