ML

Mu-Tsang Lin

TSMC: 41 patents #828 of 12,232Top 7%
Stripe: 1 patents #139 of 307Top 50%
📍 Hemei, CA: #1 of 1 inventorsTop 100%
Overall (All Time): #71,349 of 4,157,543Top 2%
42
Patents All Time

Issued Patents All Time

Showing 26–42 of 42 patents

Patent #TitleCo-InventorsDate
9929254 Method of manufacturing semiconductor device Wei-Yang Lo, Shih-Hao Chen, Tung-Wen Cheng 2018-03-27
9882013 Semiconductor device and manufacturing method thereof Jung-Wang Lu, Kuo-Hui Chang 2018-01-30
9812577 Semiconductor structure and fabricating method thereof Che-Cheng Chang, Tung-Wen Cheng, Chang-Yin Chen 2017-11-07
9799771 FinFET and method for manufacturing the same Tung-Wen Cheng, Che-Cheng Chang, Zhe Zhang 2017-10-24
9735256 Method and structure for FinFET comprising patterned oxide and dielectric layer under spacer features Che-Cheng Chang, Chih-Han Lin, Jr-Jung Lin, Shih-Hao Chen, Yung-Jung Chang 2017-08-15
9646871 Semiconductor structure with shallow trench isolation and manufacturing method thereof Che-Cheng Chang, Tung-Wen Cheng, Jui Fu Hseih 2017-05-09
9627512 Field effect transistor with non-doped channel Tung-Wen Cheng, Chang-Yin Chen, Che-Cheng Chang 2017-04-18
9559165 Semiconductor structure with strained source and drain structures and method for forming the same Tung-Wen Cheng, Chang-Yin Chen, Che-Cheng Chang 2017-01-31
9559207 Semiconductor device having epitaxy structure Wei-Yang Lo, Shih-Hao Chen, Tung-Wen Cheng 2017-01-31
7254513 Fault detection and classification (FDC) specification management apparatus and method thereof Yi-Yu Wu, Chia-Hung Chung, Jian-Hong Chen, Chon-Hwa Chu, Ie-Fun Lai +1 more 2007-08-07
7117058 Automatic statistical process control (SPC) chart generation apparatus and method thereof Tien-Wen Wang, Joseph Weizhou Fang, Ie-Fun Lai, Chon-Hwa Chu, Jian-Hong Chen +4 more 2006-10-03
6980876 Temperature-sensing wafer position detection system and method Kong-Hsin Teng, Tien-Wen Wang, Jen-Hom Chen 2005-12-27
6920891 Exhaust adaptor and method for chamber de-gassing Wie-Liang Tsai, Cherng-Chang Lee, Yen-Chan Lee, Chia-Hsin Liu 2005-07-26
6778875 Noise filter for backside helium signal Zhih-Lu Juang, Tung-Mao Lee 2004-08-17
6733617 Direct detection of dielectric etch system magnet driver and coil malfunctions Tse-Lun Chang, Sen-Tay Chang, Yao-Ping Yang 2004-05-11
6595370 Apparatus and method for reducing contamination in a wafer transfer chamber Yu-Lun Lin, Yao-Fey Chuang 2003-07-22
6444587 Plasma etch method incorporating inert gas purge Pin-Yi Hsin 2002-09-03