Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6733617 | Direct detection of dielectric etch system magnet driver and coil malfunctions | Mu-Tsang Lin, Sen-Tay Chang, Yao-Ping Yang | 2004-05-11 |
TC
Tse-Lun Chang
Overall (All Time): #3,478,534 of 4,157,543Top 85%
1
Patents All Time