Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7179663 | CDA controller and method for stabilizing dome temperature | — | 2007-02-20 |
| 6733617 | Direct detection of dielectric etch system magnet driver and coil malfunctions | Mu-Tsang Lin, Tse-Lun Chang, Yao-Ping Yang | 2004-05-11 |