Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11565365 | System and method for monitoring chemical mechanical polishing | Chih-Yu Wang, In-Tsang Lin, Hsin-Hui Chou | 2023-01-31 |
| 11017522 | Inspection and cleaning system and method for the same | Chung-Pin Chou, In-Tsang Lin, Sheng-Wen Huang, Yu-Ting Wang, Jui Kuo LAI +2 more | 2021-05-25 |
| 10872793 | System and method for monitoring operation conditions of semiconductor manufacturing apparatus | Chih-Yu Wang, Hsin-Hui Chou, In-Tsang Lin | 2020-12-22 |
| 7117058 | Automatic statistical process control (SPC) chart generation apparatus and method thereof | Mu-Tsang Lin, Joseph Weizhou Fang, Ie-Fun Lai, Chon-Hwa Chu, Jian-Hong Chen +4 more | 2006-10-03 |
| 6980876 | Temperature-sensing wafer position detection system and method | Mu-Tsang Lin, Kong-Hsin Teng, Jen-Hom Chen | 2005-12-27 |