Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326397 | In-situ apparatus for detecting abnormality in process tube | Yu-Jen Yang, Kai-Lin Chuang, Yan Chen, Sheng-Ching Kao, Jun Liu | 2025-06-10 |
| 12272576 | Apparatus and methods for determining fluid dynamics of liquid film on wafer surface | Kai-Lin Chuang, Yan Chen, Jui Kuo LAI, Jun Liu | 2025-04-08 |
| 12190036 | Method and system for semiconductor wafer defect review | Chun-Wen Wang, Meng Ku Chi, Yan Chen, Jun Liu | 2025-01-07 |
| 12119273 | System and method for high speed inspection of semiconductor substrates | Sheng-He Huang, Shiue-Ming GUO, Hsuan-Chia KAO, Yan Chen, Sheng-Ching Kao +1 more | 2024-10-15 |
| 12087611 | Semiconductor processing tool and methods of operation | Kai-Lin Chuang, Sheng-Wen Huang, Yan Chen, Jun Liu | 2024-09-10 |
| 12038389 | Wafer inspection apparatus and method | — | 2024-07-16 |
| 11935722 | Machine learning on wafer defect review | Sheng-Wen Huang, Jun Liu | 2024-03-19 |
| 11816411 | Method and system for semiconductor wafer defect review | Chun-Wen Wang, Meng Ku Chi, Yan Chen, Jun Liu | 2023-11-14 |
| 11764094 | Semiconductor processing tool and methods of operation | Kai-Lin Chuang, Sheng-Wen Huang, Yan Chen, Jun Liu | 2023-09-19 |
| 11749571 | System and method for high speed inspection of semiconductor substrates | Sheng-He Huang, Shiue-Ming GUO, Hsuan-Chia KAO, Yan Chen, Sheng-Ching Kao +1 more | 2023-09-05 |
| 11424101 | Machine learning on wafer defect review | Sheng-Wen Huang, Jun Liu | 2022-08-23 |
| 11300525 | Wafer inspection apparatus and method | — | 2022-04-12 |
| 11017522 | Inspection and cleaning system and method for the same | In-Tsang Lin, Sheng-Wen Huang, Yu-Ting Wang, Jui Kuo LAI, Hsin-Hui Chou +2 more | 2021-05-25 |
| 10871454 | Inspection method and apparatus | Yu-Liang Tseng | 2020-12-22 |
| 10825650 | Machine learning on wafer defect review | Sheng-Wen Huang, Jun Liu | 2020-11-03 |