Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12336226 | Semiconductor device structure including stacked nanostructures | Jung-Hung Chang, Zhi-Chang Lin, Shih-Cheng Chen, Chien Ning Yao, Tsung-Han CHUANG +2 more | 2025-06-17 |
| 12326397 | In-situ apparatus for detecting abnormality in process tube | Yu-Jen Yang, Chung-Pin Chou, Yan Chen, Sheng-Ching Kao, Jun Liu | 2025-06-10 |
| 12272576 | Apparatus and methods for determining fluid dynamics of liquid film on wafer surface | Chung-Pin Chou, Yan Chen, Jui Kuo LAI, Jun Liu | 2025-04-08 |
| 12191175 | Nozzle having real time inspection functions | Tsung-Chi Chen, Pei-Jung Chang, Chun-Wei Huang, Jun Liu | 2025-01-07 |
| 12087611 | Semiconductor processing tool and methods of operation | Chung-Pin Chou, Sheng-Wen Huang, Yan Chen, Jun Liu | 2024-09-10 |
| 11764094 | Semiconductor processing tool and methods of operation | Chung-Pin Chou, Sheng-Wen Huang, Yan Chen, Jun Liu | 2023-09-19 |
| 11355370 | Nozzle having real time inspection functions | Tsung-Chi Chen, Pei-Jung Chang, Chun-Wei Huang, Jun Liu | 2022-06-07 |
| 11107671 | Method of processing semiconductor substrate | Wei-Chih Hsu, Yuan-Chi Chien, Jeng-Huei Yang, Jun Liu | 2021-08-31 |
| 10504758 | Nozzle having real time inspection functions | Tsung-Chi Chen, Pei-Jung Chang, Chun-Wei Huang, Jun Liu | 2019-12-10 |
| 10269557 | Apparatus of processing semiconductor substrate | Wei-Chih Hsu, Yuan-Chi Chien, Jeng-Huei Yang, Jun Liu | 2019-04-23 |
| 9316901 | Method for forming patterns | Hsin-Yu Chen, Chia-Wei Huang, Chun-Hsien Huang, Shih-Chun Tsai | 2016-04-19 |
| 9304389 | Photomask and fabrication method thereof | En-Chiuan Liou, Sho-Shen Lee, Wen-Liang Huang, Chang-Mao Wang | 2016-04-05 |
| 9274416 | Method for forming photo-mask and OPC method | Chun-Hsien Huang, Ming-Jui Chen, Chia-Wei Huang, Hsin-Yu Chen | 2016-03-01 |
| 8954919 | Calculation method for generating layout pattern in photomask | En-Chiuan Liou, Sho-Shen Lee, Wen-Liang Huang, Chang-Mao Wang, Yu-Chin Huang | 2015-02-10 |
| 8748066 | Method for forming photomasks | Hsin-Yu Chen, Chia-Wei Huang, Chun-Hsien Huang, Shih-Chun Tsai | 2014-06-10 |
| 8729716 | Alignment accuracy mark | Wen-Liang Huang, Chia-Hung Lin, Chun-Chi Yu | 2014-05-20 |