Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107671 | Method of processing semiconductor substrate | Wei-Chih Hsu, Kai-Lin Chuang, Yuan-Chi Chien, Jun Liu | 2021-08-31 |
| 10269557 | Apparatus of processing semiconductor substrate | Wei-Chih Hsu, Kai-Lin Chuang, Yuan-Chi Chien, Jun Liu | 2019-04-23 |
| 8208714 | Formation of prescribed pattern on wafer for use in SEM defect offset | Mu-Chieh Liu, Hsiao-Wen Chung | 2012-06-26 |