Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12427558 | Semiconductor chemical mechanical polishing sludge recycling method | Ya-Min Hsieh, Hsing-Wen Hsieh, Shao-Hua Hu, Wen-Ming Cheng, Chin-An Kuan | 2025-09-30 |
| 11565365 | System and method for monitoring chemical mechanical polishing | Chih-Yu Wang, Tien-Wen Wang, In-Tsang Lin | 2023-01-31 |
| 11017522 | Inspection and cleaning system and method for the same | Chung-Pin Chou, In-Tsang Lin, Sheng-Wen Huang, Yu-Ting Wang, Jui Kuo LAI +2 more | 2021-05-25 |
| 10872793 | System and method for monitoring operation conditions of semiconductor manufacturing apparatus | Chih-Yu Wang, Tien-Wen Wang, In-Tsang Lin | 2020-12-22 |