Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8994178 | Interconnect structure and method for forming the same | Po-Cheng Shih, Hui-Chun Yang, Chih-Hung Sun | 2015-03-31 |
| 8927420 | Mechanism of forming semiconductor device having support structure | Keng-Chu Lin | 2015-01-06 |
| 8889567 | Apparatus and methods for low K dielectric layers | Yu-Yun Peng, Keng-Chu Lin, Hui-Chun Yang | 2014-11-18 |
| 8877083 | Surface treatment in the formation of interconnect structure | Chia-Cheng Chou, Mei-Ling Chen, Hui-Chun Yang, Po-Cheng Shih, Shwang-Ming Jeng | 2014-11-04 |
| 8853858 | Curing low-k dielectrics for improving mechanical strength | Keng-Chu Lin, Shwang-Ming Jeng | 2014-10-07 |
| 8853831 | Interconnect structure and method for forming the same | Po-Cheng Shih, Yu-Yun Peng, Chia-Cheng Chou | 2014-10-07 |
| 8846528 | Method of modifying a low k dielectric layer having etched features and the resulting product | Chung-Chi Ko, Chia-Cheng Chou, Keng-Chu Lin | 2014-09-30 |
| 8481412 | Method of and apparatus for active energy assist baking | Chung-Chi Ko, Chia-Cheng Chou, Keng-Chu Lin, Shwang-Ming Jeng, Mei-Ling Chen | 2013-07-09 |
| 8258629 | Curing low-k dielectrics for improving mechanical strength | Keng-Chu Lin, Shwang-Ming Jeng | 2012-09-04 |
| 8021992 | High aspect ratio gap fill application using high density plasma chemical vapor deposition | Tsang-Yu Liu, Chien-Feng Lin, Cheng-Liang Chang, Ming-Te Chen, Chia-Hui Lin +3 more | 2011-09-20 |
| 7349086 | Systems and methods for optical measurement | Jacky Huang, Chih-Ming Ke, Szu-An Wu | 2008-03-25 |