CL

Chih-Teng Liao

TSMC: 59 patents #545 of 12,232Top 5%
Overall (All Time): #39,714 of 4,157,543Top 1%
59
Patents All Time

Issued Patents All Time

Showing 1–25 of 59 patents

Patent #TitleCo-InventorsDate
12433018 Extended side contacts for transistors and methods forming same Ying-Yu Lai, Chih-Hsuan Lin, Hsi Chung Chen 2025-09-30
12432955 Source and drain structure with reduced contact resistance and enhanced mobility Chih-Shan Chen, Yi-Wei Chiu, Chih Hsuan Cheng, Tzu-Chan Weng 2025-09-30
12424568 Method for forming recesses in a substrate by etching dummy fins Wan-Chun Kuan, Yi-Wei Chiu, Tzu-Chan Weng 2025-09-23
12402386 Transistor gate structure and process Hsiu-Ling Chen, Jen-Chih Hsueh, Chen-Wei Pan, Yu-Li Lin 2025-08-26
12362238 Metal gate process and related structure Chih-Lun Lu, Jih-Sheng Yang, Chen-Wei Pan 2025-07-15
12356710 Fin height and STI depth for performance improvement in semiconductor devices having high-mobility p-channel transistors Kun-Yu Lin, En-Ping Lin, Yu-Ling Ko 2025-07-08
12334314 Dry etcher uniformity control by tuning edge zone plasma sheath Po-Lung HUNG, Yi-Tsang Hsieh, Yu-Hsi TANG, Chih-Ching Cheng 2025-06-17
12315864 Method of manufacturing a semiconductor device and a semiconductor device Chia-Chi Yu, Jui Fu Hsieh, Yu-Li Lin, Yi-Jen Chen 2025-05-27
12300741 Semiconductor device and method Chia-Cheng Tai, Tzu-Chan Weng, Yi-Wei Chiu, Chih Hsuan Cheng 2025-05-13
12283623 Semiconductor structure and method for manufacturing thereof Chih-Hsuan Lin, Hsi Chung Chen 2025-04-22
12261026 Method and apparatus for revitalizing plasma processing tools Chi-Hsing Lin, Chen-Fon CHANG, Chun-Yi Wu, Shi-Yu Ke 2025-03-25
12243929 Forming a dummy gate structure Yan-Ting Shen, Yu-Li Lin, Jui Fu Hsieh 2025-03-04
12205844 Plasma control method in semiconductor wafer fabrication Huang-Shao Ko, Jui Fu Hsieh, Chih-Ching Cheng 2025-01-21
12183579 Method for manufacturing semiconductor device Kun-Yu Lin, Yu-Ling Ko 2024-12-31
12165936 End point control in etching processes Jui Fu Hsieh, Chia-Chi Yu, Yi-Jen Chen, Chia-Cheng Tai 2024-12-10
12165873 Method of manufacturing a semiconductor device En-Ping Lin, Yu-Ling Ko, I-Chung W. Wang, Yi-Jen Chen, Sheng-Kai Jou 2024-12-10
12165851 Plasma processing method for manufacturing semiconductor structure Yu Lun Ke, Yu-Chi Lin, Yi-Tsang Hsieh, Yu-Hsi TANG 2024-12-10
12159807 Method of manufacturing semiconductor devices and semiconductor device Kun-Yu Lin, Yu-Ling Ko, I-Chen Chen, Yi-Jen Chen 2024-12-03
12142494 Small gas flow monitoring of dry etcher by OES signal Po-Lung HUNG, Yi-Tsang Hsieh, Yu-Hsi TANG, Chih-Ching Cheng 2024-11-12
12125748 Contact plug Chih-Hsuan Lin, Xi-Zong Chen 2024-10-22
12125707 Fin field-effect transistor device and method of forming Yu-Li Lin, Jui Fu Hsieh, Chih Hsuan Cheng, Tzu-Chan Weng 2024-10-22
12080582 Etching apparatus and methods of cleaning thereof Yu-Chi Lin, Huai-Tei Yang, Lun-Kuang Tan, Wei-Jen Lo 2024-09-03
12074074 Method and system for processing wafer Po-Ju Chen, Sheng-Jen Cheng, Cha-Hsin Chao 2024-08-27
12020948 Method for improved polysilicon etch dimensional control Yun He 2024-06-25
12015085 Method of manufacturing a semiconductor device including etching polysilicon Yan-Ting Shen, Chia-Chi Yu, Yu-Li Lin, Chih Hsuan Cheng, Tzu-Chan Weng 2024-06-18