Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261026 | Method and apparatus for revitalizing plasma processing tools | Chi-Hsing Lin, Chun-Yi Wu, Shi-Yu Ke, Chih-Teng Liao | 2025-03-25 |
| 11908754 | Method and system for controlling profile of critical dimension | Jun Shimada, Chih-Teng Liao | 2024-02-20 |