SK

Shi-Yu Ke

TSMC: 1 patents #8,466 of 12,232Top 70%
Overall (All Time): #2,400,144 of 4,157,543Top 60%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12261026 Method and apparatus for revitalizing plasma processing tools Chi-Hsing Lin, Chen-Fon CHANG, Chun-Yi Wu, Chih-Teng Liao 2025-03-25