Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261026 | Method and apparatus for revitalizing plasma processing tools | Chi-Hsing Lin, Chen-Fon CHANG, Chun-Yi Wu, Chih-Teng Liao | 2025-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261026 | Method and apparatus for revitalizing plasma processing tools | Chi-Hsing Lin, Chen-Fon CHANG, Chun-Yi Wu, Chih-Teng Liao | 2025-03-25 |