Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334314 | Dry etcher uniformity control by tuning edge zone plasma sheath | Po-Lung HUNG, Yi-Tsang Hsieh, Chih-Ching Cheng, Chih-Teng Liao | 2025-06-17 |
| 12165851 | Plasma processing method for manufacturing semiconductor structure | Yu Lun Ke, Yu-Chi Lin, Yi-Tsang Hsieh, Chih-Teng Liao | 2024-12-10 |
| 12142494 | Small gas flow monitoring of dry etcher by OES signal | Po-Lung HUNG, Yi-Tsang Hsieh, Chih-Teng Liao, Chih-Ching Cheng | 2024-11-12 |