Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165851 | Plasma processing method for manufacturing semiconductor structure | Yu-Chi Lin, Yi-Tsang Hsieh, Yu-Hsi TANG, Chih-Teng Liao | 2024-12-10 |
| 12080547 | Interconnect system with improved low-K dielectrics | Joung-Wei Liou, Yi-Wei Chiu | 2024-09-03 |
| 11854873 | Etch profile control of interconnect structures | Yi-Wei Chiu, Hung Jui Chang, Yu-Wei Kuo | 2023-12-26 |
| 11227747 | Etch process with rotatable shower head | Yu-Chi Lin, Yi-Wei Chiu, Hung Jui Chang, Chin-Hsing Lin | 2022-01-18 |
| 11075087 | Focus ring for plasma etcher | Yu-Chi Lin, Chin-Hsing Lin, Hung Jui Chang, Yi-Wei Chiu, Yu-Wei Kuo | 2021-07-27 |
| 11043373 | Interconnect system with improved low-k dielectrics | Joung-Wei Liou, Yi-Wei Chiu | 2021-06-22 |
| 10529543 | Etch process with rotatable shower head | Yu-Chi Lin, Yi-Wei Chiu, Hung Jui Chang, Chin-Hsing Lin | 2020-01-07 |
| 10504738 | Focus ring for plasma etcher | Yu-Chi Lin, Chin-Hsing Lin, Hung Jui Chang, Yi-Wei Chiu, Yu-Wei Kuo | 2019-12-10 |