Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334314 | Dry etcher uniformity control by tuning edge zone plasma sheath | Po-Lung HUNG, Yu-Hsi TANG, Chih-Ching Cheng, Chih-Teng Liao | 2025-06-17 |
| 12165851 | Plasma processing method for manufacturing semiconductor structure | Yu Lun Ke, Yu-Chi Lin, Yu-Hsi TANG, Chih-Teng Liao | 2024-12-10 |
| 12142494 | Small gas flow monitoring of dry etcher by OES signal | Po-Lung HUNG, Yu-Hsi TANG, Chih-Teng Liao, Chih-Ching Cheng | 2024-11-12 |
| 11532515 | Self-aligned spacers and method forming same | Cha-Hsin Chao, Yi-Wei Chiu, Li-Te Hsu, Ying Ting Hsia | 2022-12-20 |
| 10804149 | Self-aligned spacers and method forming same | Cha-Hsin Chao, Yi-Wei Chiu, Li-Te Hsu, Ying Ting Hsia | 2020-10-13 |
| 10510598 | Self-aligned spacers and method forming same | Cha-Hsin Chao, Yi-Wei Chiu, Li-Te Hsu, Ying Ting Hsia | 2019-12-17 |
| 8607100 | Motherboard testing device and testing method thereof | Yung Chang | 2013-12-10 |