Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334314 | Dry etcher uniformity control by tuning edge zone plasma sheath | Yi-Tsang Hsieh, Yu-Hsi TANG, Chih-Ching Cheng, Chih-Teng Liao | 2025-06-17 |
| 12142494 | Small gas flow monitoring of dry etcher by OES signal | Yi-Tsang Hsieh, Yu-Hsi TANG, Chih-Teng Liao, Chih-Ching Cheng | 2024-11-12 |