Issued Patents All Time
Showing 101–107 of 107 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7907384 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Karl M. Brown, Semyon Sherstinsky, Wei Wang, Vineet Haresh Mehta, Allen Lau +1 more | 2011-03-15 |
| 7697260 | Detachable electrostatic chuck | Karl M. Brown, Nora Arellano, Semyon Sherstinsky, Allen Lau, Vineet Haresh Mehta +2 more | 2010-04-13 |
| 7550090 | Oxygen plasma clean to remove carbon species deposited on a glass dome surface | Quancheng (Tommy) Gu, John C. Forster, Xiaoxi Guo, Larry Frazier | 2009-06-23 |
| 7480129 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Karl M. Brown, Semyon Sherstinsky, Wei Wang, Vineet Haresh Mehta, Allen Lau +1 more | 2009-01-20 |
| 6875927 | High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications | Karl M. Brown, Donny Young, Vineet Haresh Mehta, David H. Loo | 2005-04-05 |
| 6563686 | Pedestal assembly with enhanced thermal conductivity | Karl M. Brown, Thomas Brezoczky | 2003-05-13 |
| 6506291 | Substrate support with multilevel heat transfer mechanism | Chien-Shiung Tzou | 2003-01-14 |