Issued Patents All Time
Showing 76–89 of 89 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551758 | Onium salts, photoacid generators, resist compositions, and patterning process | Jun Watanabe, Kazunori Maeda | 2003-04-22 |
| 6541179 | Resist compositions and patterning process | Jun Hatakeyama, Tsunehiro Nishi, Jun Watanabe | 2003-04-01 |
| 6440634 | Onium salts, photoacid generators for resist compositions, resist compositions, and patterning process | Jun Watanabe, Wataru Kusaki, Satoshi Watanabe, Takeshi Nagata, Shigehiro Nagura | 2002-08-27 |
| 6420085 | Resist compositions and patterning process | Tsunehiro Nishi, Jun Hatakeyama | 2002-07-16 |
| 6416928 | Onium salts, photoacid generators, resist compositions, and patterning process | Jun Watanabe, Satoshi Watanabe, Shigehiro Nagura | 2002-07-09 |
| 6395446 | Resist compositions and patterning process | Akihiro Seki, Katsuya Takemura, Jun Watanabe, Shigehiro Nagura | 2002-05-28 |
| 6338931 | Resist compositions and patterning process | Kazunori Maeda, Takeshi Nagata, Satoshi Watanabe, Jun Watanabe, Shigehiro Nagura | 2002-01-15 |
| 6156481 | Positive resist composition | Takanobu Takeda, Osamu Watanabe, Jun Watanabe, Jun Hatakeyama, Toshinobu Ishihara | 2000-12-05 |
| 5847218 | Sulfonium salts and chemically amplified positive resist compositions | Satoshi Watanabe, Junji Shimada, Katsuya Takemura, Shigehiro Nagura, Toshinobu Ishihara | 1998-12-08 |
| 5691112 | Sulfonium salt and chemically amplified positive resist composition | Satoshi Watanabe, Toshinobu Ishihara, Kazumasa Maruyama, Yoshihumi Takeda, Junji Shimada +2 more | 1997-11-25 |
| 5679496 | Chemically amplified positive resist composition | Satoshi Watanabe, Katsuyuki Oikawa, Akinobu Tanaka, Yoshio Kawai, Jiro Nakamura | 1997-10-21 |
| 5633409 | Tristertbutoxyphenyl sulfonium tosylate compound | Satoshi Watanabe, Toshinobu Ishihara, Kazumasa Maruyama, Yoshihumi Takeda, Junji Shimada +2 more | 1997-05-27 |
| 5569784 | Sulfonium salt and resist composition | Satoshi Watanabe, Junji Shimada, Katsuya Takemura, Toshinobu Ishihara, Kazumasa Maruyama | 1996-10-29 |
| 5473174 | III-V compound semiconductor device formed on silicon substrate | — | 1995-12-05 |