Issued Patents All Time
Showing 451–475 of 563 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7179581 | Resist composition and patterning process | Takeru Watanabe | 2007-02-20 |
| 7169869 | Polymers, resist compositions and patterning process | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2007-01-30 |
| 7163778 | Anti-reflection film material and a substrate having an anti-reflection film and a method for forming a pattern | Takafumi Ueda, Tsutomu Ogihara, Motoaki Iwabuchi | 2007-01-16 |
| 7135269 | Polymer, resist composition and patterning process | Takanobu Takeda, Osamu Watanabe | 2006-11-14 |
| 7125643 | Polymers, resist compositions and patterning process | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-10-24 |
| 7125641 | Polymers, resist compositions and patterning process | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-10-24 |
| 7125642 | Sulfonates, polymers, resist compositions and patterning process | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-10-24 |
| 7105267 | Resist compositions and patterning process | Youichi Ohsawa, Tomohiro Kobayashi | 2006-09-12 |
| 7084303 | Tertiary amine compounds having an ester structure and processes for preparing same | Takeru Watanabe, Koji Hasegawa, Takeshi Kinsho | 2006-08-01 |
| 7078147 | Polymers, resist compositions and patterning process | Yuji Harada, Masaru Sasago, Masayuki Endo, Shinji Kishimura | 2006-07-18 |
| 7067231 | Polymers, resist compositions and patterning process | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-06-27 |
| 7041846 | Alicyclic methacrylate having oxygen substituent group on α-methyl | Takeru Watanabe, Takeshi Kinsho | 2006-05-09 |
| 7005228 | Polymers, resist compositions and patterning process | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +4 more | 2006-02-28 |
| 7001707 | Resist compositions and patterning process | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2006-02-21 |
| 6994946 | Silicon-containing polymer, resist composition and patterning process | Takanobu Takeda | 2006-02-07 |
| 6994945 | Silicon-containing polymer, resist composition and patterning process | Takanobu Takeda, Toshinobu Ishihara, Tohru Kubota, Yasufumi Kubota | 2006-02-07 |
| 6962767 | Acetal compound, polymer, resist composition and patterning process | Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima +1 more | 2005-11-08 |
| 6946235 | Polymers, resist compositions and patterning process | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-09-20 |
| 6933095 | Polymers, resist compositions and patterning process | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +4 more | 2005-08-23 |
| 6919161 | Silicon-containing polymer, resist composition and patterning process | Takanobu Takeda, Toshinobu Ishihara | 2005-07-19 |
| 6916592 | Esters, polymers, resist compositions and patterning process | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-07-12 |
| 6916593 | Resist composition | Youichi Ohsawa, Takeru Watanabe | 2005-07-12 |
| 6902772 | Silicon-containing polymer, resist composition and patterning process | Takanobu Takeda, Toshinobu Ishihara | 2005-06-07 |
| 6878501 | Polymer, chemically amplified resist composition and patterning process | Jun Watanabe, Yuji Harada | 2005-04-12 |
| 6875556 | Resist compositions and patterning process | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2005-04-05 |