Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7198694 | Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems | Daniel J. Woodruff, Jeffry Davis, David P. Mattson, James J. Erickson, Matthew Egloff | 2007-04-03 |
| 7114903 | Apparatuses and method for transferring and/or pre-processing microelectronic workpieces | Kyle M. Hanson | 2006-10-03 |
| 6991710 | Apparatus for manually and automatically processing microelectronic workpieces | Daniel J. Woodruff | 2006-01-31 |
| 6969841 | Method and apparatus for securing microelectronic workpiece containers | — | 2005-11-29 |
| 6921467 | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces | Kyle M. Hanson, Steve Eudy, Thomas Ritzdorf, Gregory J. Wilson, Daniel J. Woodruff +4 more | 2005-07-26 |
| 6916412 | Adaptable electrochemical processing chamber | Daniel J. Woodruff, Kyle M. Hanson, Steve Eudy, Curtis Weber | 2005-07-12 |
| 6900132 | Single workpiece processing system | Raymon F. Thompson, Jeffry Davis, Dana Scranton, Ryan Pfeifle, Steven A. Peace +1 more | 2005-05-31 |
| 6878955 | Method and apparatus for accessing microelectronic workpiece containers | Kyle M. Hanson, Daniel P. Bexten | 2005-04-12 |
| 6799150 | System and method for monitoring information delivered through an electronic delivery system | Scott M. Hamilton, Junious Gupton, Todd Beck, Varun Tandon, Glen C. Young +1 more | 2004-09-28 |
| 6752584 | TRANSFER DEVICES FOR HANDLING MICROELECTRONIC WORKPIECES WITHIN AN ENVIRONMENT OF A PROCESSING MACHINE AND METHODS OF MANUFACTURING AND USING SUCH DEVICES IN THE PROCESSING OF MICROELECTRONIC WORKPIECES | Daniel J. Woodruff | 2004-06-22 |
| 6749391 | Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces | Daniel J. Woodruff | 2004-06-15 |
| 6749390 | Integrated tools with transfer devices for handling microelectronic workpieces | Daniel J. Woodruff | 2004-06-15 |
| 6717171 | Method and apparatus for accessing microelectronic workpiece containers | Kyle M. Hanson, Daniel P. Bexten | 2004-04-06 |
| 6623609 | Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same | Daniel J. Woodruff | 2003-09-23 |
| 6575689 | Automated semiconductor immersion processing system | David Peterson, Jeffry Davis | 2003-06-10 |
| 6439824 | Automated semiconductor immersion processing system | David Peterson, Jeffry Davis | 2002-08-27 |