Issued Patents All Time
Showing 1–25 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875146 | Debris-removal groove for CMP polishing pad | Yuhua Tong, Joseph So, Jeffrey James Hendron, Patricia Connell | 2020-12-29 |
| 10037889 | Cationic particle containing slurries and methods of using them for CMP of spin-on carbon films | Julia Kozhukh, Michael E. Mills | 2018-07-31 |
| 9299585 | Method for chemical mechanical polishing substrates containing ruthenium and copper | Hongyu Wang, Jiun-Fang Wang, Ching-Hsun Chao | 2016-03-29 |
| 9150759 | Chemical mechanical polishing composition for polishing silicon wafers and related methods | Yasuyuki Itai, Naresh Kumar Penta, Naoko Kawai, Hiroyuki Nakano, Shinichi Haba +6 more | 2015-10-06 |
| 8801959 | Stable, concentratable silicon wafer polishing composition and related methods | Naresh Kumar Penta | 2014-08-12 |
| 8795548 | Silicon wafer polishing composition and related methods | Naresh Kumar Penta | 2014-08-05 |
| 6869350 | Polishing pads and methods relating thereto | John Roberts, David B. James | 2005-03-22 |
| 6860802 | Polishing pads for chemical mechanical planarization | Arun Vishwanathan, David B. James, Peter A. Burke, David Shidner | 2005-03-01 |
| 6848977 | Polishing pad for electrochemical mechanical polishing | David B. James, John V. H. Roberts | 2005-02-01 |
| 6843712 | Polishing pads and methods relating thereto | John Roberts, David B. James | 2005-01-18 |
| 6749485 | Hydrolytically stable grooved polishing pads for chemical mechanical planarization | David B. James, Arun Vishwanathan, Peter A. Burke, David Shidner, Joseph So +1 more | 2004-06-15 |
| 6739962 | Polishing pads and methods relating thereto | John V. H. Roberts, David B. James, Charles W. Jenkins | 2004-05-25 |
| 6736709 | Grooved polishing pads for chemical mechanical planarization | David B. James, Arun Vishwanathan, Peter A. Burke, David Shidner, Joseph So +1 more | 2004-05-18 |
| 6682402 | Polishing pads and methods relating thereto | John Roberts, David B. James | 2004-01-27 |
| 6648733 | Polishing pads and methods relating thereto | John V. H. Roberts, David B. James, Ronald D. Bakule | 2003-11-18 |
| 6582283 | Polishing pads for chemical mechanical planarization | David B. James, Arun Vishwanathan, Peter A. Burke, David Shidner | 2003-06-24 |
| 6518188 | Apparatus and methods for chemical-mechanical polishing of semiconductor wafers | David B. James, William D. Budinger | 2003-02-11 |
| 6500053 | Polishing pads and methods relating thereto | David B. James, Arthur Richard Baker, III | 2002-12-31 |
| 6488570 | Method relating to a polishing system having a multi-phase polishing layer | David B. James, William D. Budinger, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik +1 more | 2002-12-03 |
| 6454634 | Polishing pads for chemical mechanical planarization | David B. James, Arun Vishwanathan, Peter A. Burke, David Shidner | 2002-09-24 |
| 6425816 | Polishing pads and methods relating thereto | John V. H. Roberts, David B. James, Charles W. Jenkins | 2002-07-30 |
| 6375559 | Polishing system having a multi-phase polishing substrate and methods relating thereto | David B. James, William D. Budinger, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik +1 more | 2002-04-23 |
| 6375694 | Polishing slurry compositions capable of providing multi-modal particle packing | John V. H. Roberts, William D. Budinger | 2002-04-23 |
| 6354915 | Polishing pads and methods relating thereto | David B. James, Arthur Richard Baker, III | 2002-03-12 |
| 6325703 | Polishing pads and methods relating thereto | David B. James, Charles W. Jenkins, Heinz Reinhardt, John V. H. Roberts, Raj Raghav Pillai | 2001-12-04 |