Issued Patents All Time
Showing 26–50 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6319370 | Apparatus for photoelectrochemical polishing of silicon wafers | Lizhong Sun, James Shen | 2001-11-20 |
| 6293852 | Polishing pads and methods relating thereto | John Roberts, David B. James | 2001-09-25 |
| 6287185 | Polishing pads and methods relating thereto | John V. H. Roberts, David B. James, Charles W. Jenkins | 2001-09-11 |
| 6284114 | Method of fabricating a porous polymeric material by electrophoretic deposition | Nina G. Chechik, Richard M. Levering, Jr., David B. James | 2001-09-04 |
| 6245679 | Apparatus and methods for chemical-mechanical polishing of semiconductor wafers | David B. James, William D. Budinger, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik +1 more | 2001-06-12 |
| 6231434 | Polishing pads and methods relating thereto | David B. James, Charles W. Jenkins, Heinz Reinhardt, John V. H. Roberts, Raj Raghav Pillai | 2001-05-15 |
| 6218305 | Composition and method for polishing a composite of silica and silicon nitride | Sharath Hosali, Anantha R. Sethuraman, Jiun-Fang Wang, Michael R. Oliver | 2001-04-17 |
| 6217434 | Polishing pads and methods relating thereto | John Roberts, David B. James | 2001-04-17 |
| 6210254 | Method of manufacturing a polymeric polishing pad having photolithographically induced surface pattern(s) | David B. James, Nina G. Chechik, William D. Budinger | 2001-04-03 |
| 6210525 | Apparatus and methods for chemical-mechanical polishing of semiconductor wafers | David B. James, William D. Budinger, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik +1 more | 2001-04-03 |
| 6132637 | Composition and method for polishing a composite of silica and silicon nitride | Sharath Hosali, Anantha R. Sethuraman, Jiun-Fang Wang, Michael R. Oliver | 2000-10-17 |
| 6106754 | Method of making polishing pads | David B. James, Charles W. Jenkins, Heinz Reinhardt, John V. H. Roberts, Raj Raghav Pillai | 2000-08-22 |
| 6093649 | Polishing slurry compositions capable of providing multi-modal particle packing and methods relating thereto | John V. H. Roberts, William D. Budinger | 2000-07-25 |
| 6074546 | Method for photoelectrochemical polishing of silicon wafers | Lizhong Sun, James Shen | 2000-06-13 |
| 6042741 | Composition for polishing a composite of silica and silicon nitride | Sharath Hosali, Anantha R. Sethuraman, Jiun-Fang Wang | 2000-03-28 |
| 6036579 | Polymeric polishing pad having photolithographically induced surface patterns(s) and methods relating thereto | David B. James, Nina G. Chechik, William D. Budinger | 2000-03-14 |
| 6030899 | Apparatus and methods for recirculating chemical-mechanical polishing of semiconductor wafers | David B. James, William D. Budinger | 2000-02-29 |
| 6022268 | Polishing pads and methods relating thereto | John V. H. Roberts, David B. James | 2000-02-08 |
| 6022264 | Polishing pad and methods relating thereto | David B. James, William D. Budinger | 2000-02-08 |
| 6019666 | Mosaic polishing pads and methods relating thereto | John V. H. Roberts, David B. James, Heinz Reinhardt | 2000-02-01 |
| 6017265 | Methods for using polishing pads | David B. James, Charles W. Jenkins, Heinz Reinhardt, John V. H. Roberts, Raj Raghav Pillai | 2000-01-25 |
| 6001269 | Method for polishing a composite comprising an insulator, a metal, and titanium | Anantha R. Sethuraman, Huey-Ming Wang, Guangwei Wu | 1999-12-14 |
| 5932486 | Apparatus and methods for recirculating chemical-mechanical polishing of semiconductor wafers | David B. James, William D. Budinger | 1999-08-03 |
| 5860848 | Polishing silicon wafers with improved polishing slurries | Scott B. Loncki, James Shen, Keith G. Pierce | 1999-01-19 |
| 5769689 | Compositions and methods for polishing silica, silicates, and silicon nitride | David Cossaboon, Jiun-Fang Wang | 1998-06-23 |