Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9150759 | Chemical mechanical polishing composition for polishing silicon wafers and related methods | Naresh Kumar Penta, Naoko Kawai, Hiroyuki Nakano, Shinichi Haba, Yoshiharu Ota +6 more | 2015-10-06 |
| 8980749 | Method for chemical mechanical polishing silicon wafers | Bainian Qian, Hiroyuki Nakano, David B. James, Naoko Kawai, Katsumasa Kawabata +5 more | 2015-03-17 |
| 7611552 | Semiconductor polishing composition | Yoshiharu Ohta | 2009-11-03 |