Issued Patents All Time
Showing 26–50 of 91 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10294095 | Micromechanical sensor and method for producing a micromechanical sensor | Benny Pekka Herzogenrath | 2019-05-21 |
| 10215772 | Micromechanical structure for an acceleration sensor | — | 2019-02-26 |
| 10031038 | Micromechanical pressure sensor device including, formed side-by-side in a micromechanical functional layer, first and second micromechanical functional regions that correspond to a pressure sensor and another sensor, and corresponding manufacturing method | — | 2018-07-24 |
| 10017376 | MEMS element including a stress decoupling structure and a component including such a MEMS element | Jochen Reinmuth, Mirko Hattass, Ralf Reichenbach, Antoine Puygranier | 2018-07-10 |
| 9958348 | Micromechanical pressure sensor device and corresponding manufacturing method | Jochen Reinmuth, Arnd Kaelberer | 2018-05-01 |
| 9926188 | Sensor unit including a decoupling structure and manufacturing method therefor | Torsten Kramer, Hubert Benzel, Jens Frey, Daniel Christoph Meisel, Christoph Schelling | 2018-03-27 |
| 9863781 | Self-test for yaw rate sensors | Wolfram Bauer, Rainer Willig, Matthias Meier, Burkhard Kuhlmann, Mathias Reimann +5 more | 2018-01-09 |
| 9840410 | Micromechanical component | — | 2017-12-12 |
| 9751751 | Micromechanical component and method for manufacturing same | Jochen Reinmuth | 2017-09-05 |
| 9709451 | Micromechanical pressure sensor device and corresponding manufacturing method | Arnd Kaelberer, Jochen Reinmuth | 2017-07-18 |
| 9689676 | Yaw-rate sensor | Reinhard Neul, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn +4 more | 2017-06-27 |
| 9650236 | Micromechanical sensor device | — | 2017-05-16 |
| 9651377 | Yaw rate sensor having three sensitive axes and method for manufacturing a yaw rate sensor | Thorsten Balslink, Hendrik Specht | 2017-05-16 |
| 9650240 | Component including two semiconductor elements, which are bonded to one another via a structured bonding layer, and method for manufacturing a component of this type | Mirko Hattass, Heiko Stahl, Jochen Reinmuth, Julian Gonska | 2017-05-16 |
| 9606141 | Micromechanical sensor device | Jens Frey, Arnd Kaelberer, Jochen Reinmuth | 2017-03-28 |
| 9593948 | Yaw-rate sensor | Reinhard Neul, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn +4 more | 2017-03-14 |
| 9593949 | Yaw-rate sensor | Reinhard Neul, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn +4 more | 2017-03-14 |
| 9434606 | Micromechanical inertial sensor and method for manufacturing same | Mirko Hattass, Daniel Christoph Meisel | 2016-09-06 |
| 9291455 | Method for operating and/or for measuring a micromechanical device, and micromechanical device | Christoph Gauger, Patrick Wellner | 2016-03-22 |
| 9279822 | Micromechanical structure and method for manufacturing a micromechanical structure | — | 2016-03-08 |
| 9266720 | Hybrid integrated component | Axel Franke, Jens Frey, Heribert Weber, Frank Fischer, Patrick Wellner +2 more | 2016-02-23 |
| 9261363 | Yaw rate sensor | Reinhard Neul, Axel Franke, Marco Quander, Joerg Hauer, Udo-Martin Gomez +1 more | 2016-02-16 |
| 9229020 | Micropatterned component and method for manufacturing a micropatterned component | — | 2016-01-05 |
| 9212048 | Hybridly integrated component and method for the production thereof | Heribert Weber, Mirko Hattass, Daniel Christoph Meisel | 2015-12-15 |
| 9169116 | Hybrid integrated component and method for the manufacture thereof | Paul Farber | 2015-10-27 |