Issued Patents All Time
Showing 51–75 of 91 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9156675 | Micromechanical component and manufacturing method for a micromechanical component | Arnd Kaelberer, Jochen Reinmuth | 2015-10-13 |
| 9097736 | Micromechanical component and method for manufacturing a micromechanical component | Arnd Kaelberer, Lars Tebje | 2015-08-04 |
| 9081027 | Yaw-rate sensor | Reinhard Neul, Torsten Ohms, Burkhard Kuhlmann, Axel Franke, Oliver Kohn +4 more | 2015-07-14 |
| 9067778 | Method for manufacturing a hybrid integrated component | Heribert Weber | 2015-06-30 |
| 9040336 | Method for manufacturing a cap for a MEMS component, and hybrid integrated component having such a cap | Axel Franke, Jens Frey, Heribert Weber, Frank Fischer, Patrick Wellner | 2015-05-26 |
| 8955379 | Yaw rate sensor and method for manufacturing a mass element | — | 2015-02-17 |
| 8956544 | Method for manufacturing a micromechanical structure, and micromechanical structure | Jochen Reinmuth, Sebastian Guenther, Pia Bustian-Todorov | 2015-02-17 |
| 8952466 | Flexible stop for an acceleration sensor | Jochen Reinmuth, Guenther-Nino-Carlo Ullrich | 2015-02-10 |
| 8928099 | Micromechanical component and method for the manufacture of same | Jochen Reinmuth, Andreas Scheurle | 2015-01-06 |
| 8915137 | Yaw rate sensor, yaw rate sensor system, and method for operating a yaw rate sensor | Torsten Ohms, Daniel Christoph Meisel, Joerg Hauer | 2014-12-23 |
| 8910518 | Self-test for yaw rate sensors | Wolfram Bauer, Rainer Willig, Matthias Meier, Burkhard Kuhlmann, Mathias Reimann +5 more | 2014-12-16 |
| 8901679 | Micromechanical structure, in particular sensor arrangement, and corresponding operating method | Mirko Hattass, Lars Tebje, Daniel Christoph Meisel | 2014-12-02 |
| 8866238 | Hybrid integrated component and method for the manufacture thereof | — | 2014-10-21 |
| 8850890 | Inertial sensor and method for manufacturing an inertial sensor | — | 2014-10-07 |
| 8806940 | Micromechanical component | — | 2014-08-19 |
| 8783108 | Micromechanical system for detecting an acceleration | — | 2014-07-22 |
| 8759927 | Hybrid intergrated component | Jens Frey | 2014-06-24 |
| 8746066 | Acceleration sensor having a damping device | Sebastian Guenther, Harald Steffes | 2014-06-10 |
| 8726731 | Micromechanical structures | Christoph Gauger | 2014-05-20 |
| 8695425 | Yaw rate sensor | — | 2014-04-15 |
| 8689633 | Micromechanical system | — | 2014-04-08 |
| 8683863 | Micromechanical yaw rate sensor having two sensitive axes and coupled detection modes | Burkhard Kuhlmann, Daniel Christoph Meisel | 2014-04-01 |
| 8596122 | Micromechanical component and method for operating a micromechanical component | Lars Tebje | 2013-12-03 |
| 8573054 | Manufacturing method for a rotation sensor device and rotation sensor device | — | 2013-11-05 |
| 8561465 | Rotation rate sensor | Torsten Ohms, Daniel Christoph Meisel, Joerg Hauer | 2013-10-22 |