Issued Patents All Time
Showing 76–100 of 119 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7180191 | Semiconductor device and method of manufacturing a semiconductor device | Yoichi Sasaki, Koichi Ohto, Noboru Morita, Hidenobu Miyamoto | 2007-02-20 |
| 7148571 | Semiconductor device and method of manufacturing the same | — | 2006-12-12 |
| 7135776 | Semiconductor device and method for manufacturing same | Noboru Morita, Koichi Ohto | 2006-11-14 |
| 7132732 | Semiconductor device having two distinct sioch layers | Koichi Ohto, Noboru Morita, Sadayuki Ohnishi, Koji Arita, Ryohei Kitao +1 more | 2006-11-07 |
| 7102236 | Carbon containing silicon oxide film having high ashing tolerance and adhesion | Sadayuki Ohnishi, Kouichi Ohto, Noboru Morita, Kouji Arita, Ryouhei Kitao +1 more | 2006-09-05 |
| 7074698 | Method of fabricating semiconductor device using plasma-enhanced CVD | Noboru Morita, Koichi Ohto, Sadayuki Ohnishi, Koji Arita, Ryohei Kitao +1 more | 2006-07-11 |
| 7057286 | Semiconductor device and method of manufacturing the same | — | 2006-06-06 |
| 7045898 | Semiconductor device and manufacturing method thereof | — | 2006-05-16 |
| 7045895 | Semiconductor device and method for manufacturing the same | Noboru Morita | 2006-05-16 |
| 6984875 | Semiconductor device with improved reliability and manufacturing method of the same | — | 2006-01-10 |
| 6977438 | Dual damascene circuit with upper wiring and interconnect line positioned in regions formed as two layers including organic polymer layer and low-permittivity layer | — | 2005-12-20 |
| 6930036 | Semiconductor device and method of manufacturing the same | — | 2005-08-16 |
| 6787480 | Manufacturing method of semicondcutor device | Hidemitsu Aoki, Hiroaki Tomimori, Norio Okada, Koichi Ohto, Takamasa Tanikuni | 2004-09-07 |
| 6670709 | Semiconductor device and method of manufacturing the same | — | 2003-12-30 |
| 6589863 | Semiconductor device and manufacturing method thereof | — | 2003-07-08 |
| 6531755 | Semiconductor device and manufacturing method thereof for realizing high packaging density | — | 2003-03-11 |
| 6528410 | Method for manufacturing semiconductor device | Hiraku Ishikawa | 2003-03-04 |
| 6514852 | Semiconductor device and method of manufacturing the same | — | 2003-02-04 |
| 6498398 | Semiconductor device having through holes selectively through isolation material covering wirings that are relatively far apart | — | 2002-12-24 |
| 6483193 | Fabrication process for a semiconductor device with damascene interconnect lines of the same level separated by insulators with different dielectric constants | — | 2002-11-19 |
| 6479407 | Semiconductor device and process for producing the same | Takashi Yokoyama | 2002-11-12 |
| 6468898 | Method of manufacturing semiconductor device | — | 2002-10-22 |
| 6383927 | Process for fabricating semiconductor device, apparatus using more than one kind of inert gas for evacuating air and method for entering wafer into the apparatus | — | 2002-05-07 |
| 6358808 | Semiconductor element with thermally nitrided film on high resistance film and method of manufacturing the same | — | 2002-03-19 |
| 6340843 | Plasma CVD dielectric film and process for forming the same | — | 2002-01-22 |