Issued Patents All Time
Showing 25 most recent of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8420549 | Etching and cleaning methods and etching and cleaning apparatuses used therefor | Shinya Yamasaki | 2013-04-16 |
| 8129287 | Method for manufacturing semiconductor device and semiconductor device | Tatsuya Suzuki | 2012-03-06 |
| 7943516 | Manufacturing method for semiconductor device | Tatsuya Suzuki, Takuo Ohwada, Kaoru Ikegami, Norio Ishikawa | 2011-05-17 |
| 7862658 | Etching and cleaning methods and etching and cleaning apparatuses used therefor | Shinya Yamasaki | 2011-01-04 |
| 7718532 | Method of forming a high-k film on a semiconductor device | Hiroaki Tomimori, Toshiyuki Iwamoto | 2010-05-18 |
| 7687918 | Semiconductor device and method for manufacturing same | Yorinobu Kunimune, Mieko Hasegawa, Takamasa Itou, Takeshi Takeda | 2010-03-30 |
| 7592266 | Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device | Hiroaki Tomimori | 2009-09-22 |
| 7560372 | Process for making a semiconductor device having a roughened surface | Hiroaki Tomimori, Kaoru Mikagi, Akira Furuya, Tetsuya Tao | 2009-07-14 |
| 7442652 | Method for removing contamination and method for fabricating semiconductor device | Kaori Watanabe | 2008-10-28 |
| 7402530 | Method for manufacturing semiconductor device and semiconductor device | Tatsuya Suzuki | 2008-07-22 |
| 7368064 | Cleaning solution and manufacturing method for semiconductor device | Tatsuya Suzuki, Takuo Ohwada, Kaoru Ikegami, Norio Ishikawa | 2008-05-06 |
| 7351354 | Tungsten metal removing solution and method for removing tungsten metal by use thereof | Toshikazu Shimizu, Kaori Watanabe | 2008-04-01 |
| 7312160 | Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device | Hiroaki Tomimori | 2007-12-25 |
| 7312186 | Cleaning solution for semiconductor substrate | Masayuki Takashima, Yoshiko Kasama, Hiroaki Tomimori | 2007-12-25 |
| 7268087 | Manufacturing method of semiconductor device | Hiroaki Tomimori, Norio Okada, Tatsuya Usami, Koichi Ohto, Takamasa Tanikuni | 2007-09-11 |
| 7192835 | Method of forming a high-k film on a semiconductor device | Hiroaki Tomimori, Toshiyuki Iwamoto | 2007-03-20 |
| 7186354 | Anticorrosive treating concentrate | Hiroaki Tomimori, Masayuki Takashima | 2007-03-06 |
| 7170172 | Semiconductor device having a roughened surface | Hiroaki Tomimori, Kaoru Mikagi, Akira Furuya, Tetsuya Tao | 2007-01-30 |
| 7141121 | Semiconductor washing solution and method of producing semiconductor device using the same | — | 2006-11-28 |
| 7138362 | Washing liquid composition for semiconductor substrate | Yumiko Abe, Norio Ishikawa, Hiroaki Tomimori, Yoshiko Kasama | 2006-11-21 |
| 7087562 | Post-CMP washing liquid composition | Yumiko Abe, Takuo Oowada, Norio Ishikawa, Hiroaki Tomimori | 2006-08-08 |
| 7087494 | Method for manufacturing semiconductor device and semiconductor device | Tatsuya Suzuki | 2006-08-08 |
| 6998352 | Cleaning method, method for fabricating semiconductor device and cleaning solution | Hiroaki Tomimori, Kenichi Yamamoto | 2006-02-14 |
| 6992050 | Stripping agent composition and method of stripping | Tatsuya Koita, Keiji Hirano, Hiroaki Tomimori | 2006-01-31 |
| 6964724 | Etching and cleaning methods and etching and cleaning apparatuses used therefor | Shinya Yamasaki | 2005-11-15 |