Issued Patents All Time
Showing 51–70 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6241584 | Method of washing a semiconductor device | — | 2001-06-05 |
| 6225217 | Method of manufacturing semiconductor device having multilayer wiring | Tatsuya Usami, Yasuaki Tsuchiya, Shinya Yamasaki | 2001-05-01 |
| 6183351 | Method of supplying a chemical mechanical polishing liquid and apparatus therefor | — | 2001-02-06 |
| 6140225 | Method of manufacturing semiconductor device having multilayer wiring | Tatsuya Usami, Yasuaki Tsuchiya, Shinya Yamasaki | 2000-10-31 |
| 6136708 | Method for manufacturing semiconductor device | — | 2000-10-24 |
| 6132592 | Method of etching non-doped polysilicon | Shinya Yamasaki, Yasushi Sasaki | 2000-10-17 |
| 6080709 | Cleaning solution for cleaning substrates to which a metallic wiring has been applied | Norio Ishikawa, Kiyoto Mori | 2000-06-27 |
| 6051124 | Zeta-potential determining apparatus | — | 2000-04-18 |
| 6036581 | Substrate cleaning method and apparatus | — | 2000-03-14 |
| 5994142 | Method for collecting a metallic contaminants from a wafer | Shinya Yamasaki | 1999-11-30 |
| 5989919 | Method for analyzing contamination within hole in semiconductor device | — | 1999-11-23 |
| 5833831 | Method and system for generating electrolyzed water | Hiroshi Kitajima | 1998-11-10 |
| 5762779 | Method for producing electrolyzed water | Yoshimi Shiramizu, Masaharu Nakamori, Hirofumi Seo, Haruto Hamano | 1998-06-09 |
| 5676760 | Method for wet processing of a semiconductor substrate | Makoto Morita, Mikio Tsuji | 1997-10-14 |
| 5635053 | Method and apparatus for cleaning electronic parts | Masaharu Nakamori, Koji Yamanaka, Takashi Imaoka, Takashi Futatsuki, Yukinari Yamashita | 1997-06-03 |
| 5616221 | Electrolytic ionized water producing apparatus | Koji Yamanaka, Takashi Imaoka, Takashi Futatsuki, Yukinari Yamashita | 1997-04-01 |
| 5599438 | Method for producing electrolyzed water | Yoshimi Shiramizu, Masaharu Nakamori, Hirofumi Seo, Haruto Hamano | 1997-02-04 |
| 5578193 | Method and apparatus for wet treatment of solid surfaces | Tsutomu Nakajima | 1996-11-26 |
| 5549798 | Wet processing apparatus having individual reactivating feedback paths for anode and cathode water | Hiroshi Kitajima, Haruto Hamano, Makoto Morita, Yoshimi Shiramizu, Masaharu Nakamori +6 more | 1996-08-27 |
| 5543030 | Method for producing electrolyzed water | Yoshimi Shiramizu, Masaharu Nakamori, Hirofumi Seo, Haruto Hamano | 1996-08-06 |