Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11732365 | Composition for removing ruthenium | Itsuki KASHIWAGI | 2023-08-22 |
| 11512397 | Etchant composition and method for etching | Ryou Kouno | 2022-11-29 |
| 11279904 | Cleaning liquid composition | Kikue Morita, Areji Takanaka | 2022-03-22 |
| 11046910 | Cleaning solution composition | Yumiko Taniguchi, Areji Takanaka | 2021-06-29 |
| 9334470 | Cleaning liquid composition for electronic device | Yumiko Taniguchi, Kikue Morita, Chiyoko Horike | 2016-05-10 |
| 8513140 | Post-dry etching cleaning liquid composition and process for fabricating semiconductor device | Masafumi Muramatsu, Kazumi Asada, Yukino Hagino, Atsushi Okuyama, Takahito Nakajima +4 more | 2013-08-20 |
| 8105998 | Liquid composition for removing photoresist residue and polymer residue | — | 2012-01-31 |
| 7943516 | Manufacturing method for semiconductor device | Hidemitsu Aoki, Tatsuya Suzuki, Kaoru Ikegami, Norio Ishikawa | 2011-05-17 |
| 7368064 | Cleaning solution and manufacturing method for semiconductor device | Hidemitsu Aoki, Tatsuya Suzuki, Kaoru Ikegami, Norio Ishikawa | 2008-05-06 |