Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8513140 | Post-dry etching cleaning liquid composition and process for fabricating semiconductor device | Masafumi Muramatsu, Kazumi Asada, Atsushi Okuyama, Takahito Nakajima, Kazuhiko Takase +4 more | 2013-08-20 |