Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8513140 | Post-dry etching cleaning liquid composition and process for fabricating semiconductor device | Masafumi Muramatsu, Kazumi Asada, Yukino Hagino, Atsushi Okuyama, Takahito Nakajima +4 more | 2013-08-20 |
| 7776754 | Semiconductor device manufacturing method and chemical fluid used for manufacturing semiconductor device | Yoshihiro Uozumi, Tsuyoshi Matsumura | 2010-08-17 |
| 7700490 | Semiconductor manufacturing method for removing residue generated by dry etching | Tsuyoshi Matsumura | 2010-04-20 |
| 7632358 | Cleaning method and a cleaning device for cleaning an edge portion and back face of a wafer | Masao Iwase | 2009-12-15 |
| 6289473 | Semiconductor device having a debug function | — | 2001-09-11 |
| 6152153 | Substrate cleaning/drying equipment and substrate cleaning/drying method | Yuji Fukazawa | 2000-11-28 |
| 5810940 | Method for cleaning semiconductor wafers | Yuji Fukazawa, Takahito Nakajima | 1998-09-22 |
| 5744402 | Method of manufacturing semiconductor devices | Yuji Fukazawa | 1998-04-28 |