Deposition of N-metal films comprising aluminum alloys

Assignee

• Applied Materials

Inventors

• Srinivas Gandikota (155 patents)
• Xinliang Lu (62 patents)
• Shih Chung Chen (51 patents)
• Wei V. Tang (32 patents)
• Jing Zhou (17 patents)
• Seshadri Ganguli (93 patents)
• David Thompson (117 patents)
• Jeffrey W. Anthis (75 patents)
• Atif Noori (22 patents)
• Faruk Gungor (12 patents)
• Dien-Yeh Wu (62 patents)
• Mei Chang (175 patents)
• Xinyu Fu (52 patents)
• Yu Lei (71 patents)

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