Positioning system, lithographic apparatus and device manufacturing method

Assignee

• Asml Netherlands B.V.

Inventors

• Hans Butler (152 patents)
• Martinus Agnes Willem Cuijpers (15 patents)
• Christiaan Alexander Hoogendam (192 patents)
• Robertus Johannes Marinus De Jongh (11 patents)
• Michael Jozef Mathijs Renkens (19 patents)
• Marc Wilhelmus Maria Van Der Wijst (43 patents)
• Maurice Willem Jozef Etiënne Wijckmans (19 patents)
• Robertus Leonardus Tousain (19 patents)
• Ronald Petrus Hendricus Faassen (2 patents)
• Adrianus Hendrik Koevoets (25 patents)

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