Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9122173 | Positioning system, lithographic apparatus and device manufacturing method | Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens +4 more | 2015-09-01 |
| 8144310 | Positioning system, lithographic apparatus and device manufacturing method | Hans Butler, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Robertus Johannes Marinus De Jongh, Michael Jozef Mathijs Renkens +4 more | 2012-03-27 |