Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fluid extraction system, lithographic apparatus and device manufacturing method

Fluid extraction system, lithographic apparatus and device manufacturing method

US Patent 8654309 · Granted Feb 18, 2014

Estimated economic value: $9,235,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Fluid handling system, method and lithographic apparatus2025
Substrate support and substrate table2025
Fluid handling system, method and lithographic apparatus2025
Substrate holder for use in a lithographic apparatus2025
Lithographic apparatus and device manufacturing method2024
Lithographic apparatus and a method of operating the apparatus2024
Lithographic apparatus and a method of operating the apparatus2024
Electrode for use in a layered device structure, as well as a battery device2024
Fluid handling structure for lithographic apparatus2024
Lithographic apparatus and device manufacturing method2023
Substrate holder for use in a lithographic apparatus2023
Fluid handling structure and lithographic apparatus2023