Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Fluid handling structure and lithographic apparatus

Fluid handling structure and lithographic apparatus

US Patent 11614689 · Granted Mar 28, 2023

Estimated economic value: $149,990,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and system for layerwise forming an object from a medium capable of solid2025
Measurement system and method for characterizing a patterning device2025
Fluid handling system, method and lithographic apparatus2025
Fluid handling system, method and lithographic apparatus2025
Fluid handling system, method and lithographic apparatus2025
Valved vascular prosthesis and manufacturing method thereof2025
Dynamically determining origin and destination locations for a network system2025
Pressure control valve, a fluid handling structure for lithographic apparatus an2025
Fluid handling system, method and lithographic apparatus2025
Fluid handling system, method and lithographic apparatus2025
Lithography apparatus and a method of manufacturing a device2025
Lithography apparatus and a method of manufacturing a device2025