Substrate holder for use in a lithographic apparatus

Assignee

• Asml Netherlands B.V.

Inventors

• Niek Jacobus Johannes Roset (25 patents)
• Marcus Martinus Petrus Adrianus Vermeulen (19 patents)
• Simon Karel RAVENSBERGEN (6 patents)
• Mark Constant Johannes Baggen (13 patents)
• Gijs Kramer (15 patents)
• Roger Anton Marie Timmermans (7 patents)
• Frank Pieter Albert Van Den Berkmortel (7 patents)

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