Issued Patents All Time
Showing 51–75 of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7195540 | Method and system for endpoint detection | — | 2007-03-27 |
| 7169015 | Apparatus for optical inspection of wafers during processing | — | 2007-01-30 |
| 7122817 | Lateral shift measurement using an optical technique | Boaz Brill, David Schiener | 2006-10-17 |
| 7030957 | Monitoring apparatus and method particularly useful in photolithographically processing substrates | Giora Dishon, Zvi Nirel, Yoel Cohen | 2006-04-18 |
| 7019850 | Method and system for thin film characterization | — | 2006-03-28 |
| 6974962 | Lateral shift measurement using an optical technique | Boaz Brill, David Scheiner | 2005-12-13 |
| 6842220 | Monitoring apparatus and method particularly useful in photolithographically processing substrates | Giora Dishon, Yoel Cohen, Zvi Nirel | 2005-01-11 |
| 6833048 | Apparatus for in-cassette monitoring of semiconductor wafers | Rani Kipper | 2004-12-21 |
| 6806971 | Method and apparatus for process control in semiconductor manufacture | — | 2004-10-19 |
| 6801315 | Method and system for overlay measurement | David Scheiner | 2004-10-05 |
| 6801326 | Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects | David Scheiner, Avi Ravid | 2004-10-05 |
| 6791686 | Apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and a method for use thereof | — | 2004-09-14 |
| 6764379 | Method and system for endpoint detection | — | 2004-07-20 |
| 6752689 | Apparatus for optical inspection of wafers during polishing | — | 2004-06-22 |
| 6733619 | Apparatus for integrated monitoring of wafers and for process control in semiconductor manufacturing and a method for use thereof | — | 2004-05-11 |
| 6720568 | Method and system for optical inspection of a structure formed with a surface relief | Yoel Cohen | 2004-04-13 |
| 6657736 | Method and system for measuring patterned structures | Boaz Brill | 2003-12-02 |
| 6650424 | Method and system for measuring in patterned structures | Boaz Brill | 2003-11-18 |
| 6643017 | Method and system for controlling the photolithography process | Yoel Cohen | 2003-11-04 |
| 6603529 | Monitoring apparatus and method particularly useful in photolithographically processing substrates | — | 2003-08-05 |
| RE38153 | Two-dimensional beam deflector | — | 2003-06-24 |
| 6426502 | Apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and a method for use thereof | — | 2002-07-30 |
| 6424417 | Method and system for controlling the photolithography process | Yoel Cohen | 2002-07-23 |
| 6407809 | Optical inspection system and method | Natalie Levinsohn, Shay Ghilai | 2002-06-18 |
| 6368182 | Apparatus for optical inspection of wafers during polishing | Eran Dvir, Eli Haimovich, Benjamin Shulman, Rony Abaron | 2002-04-09 |