Issued Patents All Time
Showing 26–50 of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7864343 | Method and system for measuring patterned structures | Boaz Brill | 2011-01-04 |
| RE41906 | Two dimensional beam deflector | — | 2010-11-02 |
| 7821614 | Monitoring apparatus and method particularly useful in photolithographically processing substrates | Giora Dishon, Zvi Nirel, Yoel Cohen | 2010-10-26 |
| 7791740 | Method and system for measuring patterned structures | Boaz Brill | 2010-09-07 |
| 7760368 | Method and system for measuring patterned structures | Boaz Brill | 2010-07-20 |
| 7715007 | Lateral shift measurement using an optical technique | Boaz Brill, David Schiener | 2010-05-11 |
| 7663768 | Method and system for measuring patterned structures | Boaz Brill | 2010-02-16 |
| 7626711 | Method and system for measuring patterned structures | Boaz Brill | 2009-12-01 |
| 7626710 | Method and system for measuring patterned structures | Boaz Brill | 2009-12-01 |
| 7614932 | Method and system for endpoint detection | — | 2009-11-10 |
| 7595896 | Thin films measurement method and system | Yoel Cohen, Klara Vinokur | 2009-09-29 |
| 7525634 | Monitoring apparatus and method particularly useful in photolithographically | Giora Dishon, Zvi Nirel, Yoel Cohen | 2009-04-28 |
| 7495782 | Method and system for measuring patterned structures | Boaz Brill | 2009-02-24 |
| 7482596 | Vacuum UV based optical measuring method and system | — | 2009-01-27 |
| 7477405 | Method and system for measuring patterned structures | Boaz Brill | 2009-01-13 |
| RE40225 | Two-dimensional beam deflector | — | 2008-04-08 |
| 7330259 | Optical measurements of patterned articles | Shahar Gov | 2008-02-12 |
| 7327476 | Thin films measurement method and system | Yoel Cohen, Klara Vinokur | 2008-02-05 |
| 7301163 | Lateral shift measurement using an optical technique | Boaz Brill, David Schiener | 2007-11-27 |
| 7292341 | Optical system operating with variable angle of incidence | Boaz Brill, David Scheiner | 2007-11-06 |
| 7289190 | Monitoring apparatus and method particularly useful in photolithographically | Giora Dishon, Zvi Nirel, Yoel Cohen | 2007-10-30 |
| 7289234 | Method and system for thin film characterization | — | 2007-10-30 |
| 7255748 | Apparatus for integrated monitoring of wafers and for process control in semiconductor manufacturing and a method for use thereof | — | 2007-08-14 |
| 7251043 | Method and system for measuring thin films | — | 2007-07-31 |
| 7245375 | Optical measurement device and method | — | 2007-07-17 |