Issued Patents All Time
Showing 76–87 of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368181 | Apparatus for optical inspection of wafers during polishing | Eran Dvir, Eli Haimovich, Beniamin Shulman | 2002-04-09 |
| 6292265 | Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects | David Scheiner, Avi Ravid | 2001-09-18 |
| 6281974 | Method and apparatus for measurements of patterned structures | David Scheiner | 2001-08-28 |
| 6166801 | Monitoring apparatus and method particularly useful in photolithographically processing substrates | Giora Dishon, Yoel Cohen, Zvi Nirel | 2000-12-26 |
| 6100985 | Method and apparatus for measurements of patterned structures | David Scheiner | 2000-08-08 |
| 6038029 | Method and apparatus for alignment of a wafer | — | 2000-03-14 |
| 5957749 | Apparatus for optical inspection of wafers during polishing | — | 1999-09-28 |
| 5764365 | Two-dimensional beam deflector | — | 1998-06-09 |
| 5604344 | Autofocussing microscope having a pattern imaging system | — | 1997-02-18 |
| 5517312 | Device for measuring the thickness of thin films | — | 1996-05-14 |
| 5450201 | Apparatus and method for optical inspection of articles | Yigal Katzir | 1995-09-12 |
| 5333052 | Method and apparatus for automatic optical inspection | — | 1994-07-26 |