Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6885446 | Method and system for monitoring a process of material removal from the surface of a patterned structure | Vladimir Machavariani, David Scheiner, Amit Weingarten | 2005-04-26 |
| 6801326 | Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects | Moshe Finarov, David Scheiner | 2004-10-05 |
| 6654108 | Test structure for metal CMP process control | Vladimir Machavariani, Amit Weingarten | 2003-11-25 |
| 6556947 | Optical measurements of patterned structures | David Scheiner | 2003-04-29 |
| 6292265 | Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects | Moshe Finarov, David Scheiner | 2001-09-18 |