Issued Patents All Time
Showing 26–50 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7986042 | Method for fabrication of a semiconductor device and structure | Zvi Or-Bach, Brian Cronquist, Jan Lodewijk de Jong, Deepak C. Sekar | 2011-07-26 |
| 7964916 | Method for fabrication of a semiconductor device and structure | Zvi Or-Bach, Brian Cronquist, Jan Lodewijk de Jong, Deepak C. Sekar | 2011-06-21 |
| 7960242 | Method for fabrication of a semiconductor device and structure | Zvi Or-Bach, Brian Cronquist, Jan Lodewijk de Jong, Deepak C. Sekar | 2011-06-14 |
| 7772121 | Method of forming a trench structure | Liang-Yuh Chen, Daniel Carl | 2010-08-10 |
| 7732353 | Methods of forming a denuded zone in a semiconductor wafer using rapid laser annealing | — | 2010-06-08 |
| 7427568 | Method of forming an interconnect structure | Liang-Yuh Chen, Daniel Carl | 2008-09-23 |
| 7401066 | Correlation of end-of-line data mining with process tool data mining | Amir Feili, Amos Dor | 2008-07-15 |
| 7115516 | Method of depositing a material layer | Liang-Yuh Chen, Daniel Carl | 2006-10-03 |
| 6954711 | Test substrate reclamation method and apparatus | Paul V. Miller | 2005-10-11 |
| 6402850 | Depositing polysilicon films having improved uniformity and apparatus therefor | Mahalingam Venkatesan, Christian M. Gronet | 2002-06-11 |
| 6197694 | In situ method for cleaning silicon surface and forming layer thereon in same chamber | — | 2001-03-06 |
| 6169030 | Metallization process and method | Mehul Naik, Ted Guo, Liang-Yuh Chen, Roderick C. Mosely | 2001-01-02 |
| 6146464 | Susceptor for deposition apparatus | Mahalingam Venkatesan, Roger N. Anderson | 2000-11-14 |
| 6017144 | Method and apparatus for depositing highly oriented and reflective crystalline layers using a low temperature seeding layer | Ted Guo, Mehul Naik, Liang Chen, Roderick C. Mosely | 2000-01-25 |
| 5940733 | Method of making polysilicon/tungsten silicide multilayer composite on an integrated circuit structure | Ramanujapuram A. Srinivas | 1999-08-17 |
| 5932286 | Deposition of silicon nitride thin films | Mahalingam Venkatesan | 1999-08-03 |
| 5876797 | Low temperature high pressure silicon deposition method | David K. Carlson | 1999-03-02 |
| 5874129 | Low temperature, high pressure silicon deposition method | Mali Venkatesan | 1999-02-23 |
| 5834059 | Process of depositing a layer of material on a wafer with susceptor back coating | Roger N. Anderson, H. Peter W. Hey, Mahalingam Venkatesan | 1998-11-10 |
| 5725673 | Semiconductor wafer process chamber with susceptor back coating | Roger N. Anderson, H. Peter W. Hey, Mahalingam Venkatesan | 1998-03-10 |
| 5700520 | Low temperature, high pressure silicon deposition method | David K. Carlson | 1997-12-23 |
| 5695819 | Method of enhancing step coverage of polysilicon deposits | Mahalingam Venkatesan | 1997-12-09 |
| 5645646 | Susceptor for deposition apparatus | Mahalingam Venkatesan, Roger N. Anderson | 1997-07-08 |
| 5614257 | Low temperature, high pressure silicon deposition method | Mali Venkatesan | 1997-03-25 |
| 5607724 | Low temperature high pressure silicon deposition method | David K. Carlson | 1997-03-04 |